Dr. Demetre J. EconomouProfessor and Associate Chairman of Chemical and Biomolecular Engineering |
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Dr. Vincent M. DonnellyProfessor of Chemical and Biomolecular Engineering Office Location: S232, Engineering Building 1 |
Postdoctoral Research Associates
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Paola DiomedePh.D. in Chemical Sciences, University of Bari, Italy, 2005 Research interests |
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Email: pdiomede@uh.edu |
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Jing Hu PhD in Aerospace Engineering, Missouri University of Science and Technology (formerly Missouri-Rolla), 2012 Research Focus: Plasma Etching; Diagnostics of Microwave and RF Plasma; Plasma Propulsion; Low-pressure pulsed discharge; charge particle interactions; MHD flow control; Email: jhu10@Central.UH.EDu |
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Graduate Students |
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Weiye ZhuProject: Atomic Layer Etching |
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Siyuan TianProject: Nanopantography |
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Ashutosh K SrivastavaProject: Spinning Wall |
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Shyam SridharProject: Atomic Layer Etching |
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Lei LiuProject: Atomic Layer Etching |
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Qiaowei Lou Project: SiN Etching |
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Sanbir Kaler Project: SiN Etching |
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Visiting Researchers |
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John A. MuchaPhD, Senior Research Associate |
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Former Members |
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Current Affilation |
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Erdinc Karakas |
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Postdoc. |
GLOBALFOUNDRIES, Albany NY |
Carol Chen |
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Ph.D. |
Micron |
Se Youn Moon |
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Postdoc. |
Jeonbuk National University, Korea |
Hyungjoo Shin |
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Postdoc. |
Lam Research Corp., Fremont CA |
Rohit Khare "Spinning Wall" |
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Ph.D. |
Lam Research Corp., Fremont CA |
Sergey Belostotskiy, "Diagnostics of High Pressure Microdischarge Plasmas" December 2009 |
Ph.D. |
Applied Materials, Santa Clara, CA |
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Alok Ranjan, “Diagnostics of Fast Neutral Beams” |
Ph.D |
Tokyo Electron, Albany, NY |
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| Manish Kumar Jain, “Simulations and Experimental Studies of Nanopantography, a Method for Parallel Patterning over Large Areas” December 2007 |
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M.Sc. |
Bechtel, Houston, TX. |
Lin Xu, “Nanopantography: A New Method for Massively Parallel Nanopatterning Over Large Areas” August 2008. |
Ph.D |
Lam Research Corp., Fremont, CA |
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Nirmal Tatavalli Mittadar, “Efficient Design of Experiments for Complex Response Surfaces with Application to Etching Uniformity in a Plasma Reactor August 2007. |
Ph.D |
Shell Global Solutions, Houston, TX. |
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Qiang Wang, “Experimental and Theoretical Investigation of Atmospheric Pressure Direct Current Microdischarges” December 2006 |
Ph.D |
Technip, Houston, TX |
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Sang Ki Nam, “Particle-in-Cell Simulation of Beam Extraction from a Plasma through a Grid: Application to Neutral beam Sources and Nanopantography” August 2006 |
Ph.D |
Lam Research Corp., Fremont, CA |
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| Doosik Kim, “Plasma Molding Over Surface Topography: Simulation of Ion Flow, and Energy and Angular Distributions Over Steps and Trenches in RF High Density Plasmas” August 2002 |
Ph.D |
Intel Corp. |
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Badri Ramamurthi, “Simulation of Low-Pressure Inductively Coupled Plasmas: Non-Local Effects and Pulsed Power Operation" August 2002 |
Ph.D |
General Electric R&D Center |
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Chang-Koo Kim, “Interaction of a Plasma with a Hole Having Diameter Larger than the Sheath Thickness” December 2000 |
Ph.D |
Associate Professor, Department of Chemical Engineering, Ajou University, South Korea. |
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Siddhartha Panda, “Anisotropic Etching of Polymer Films by Energetic (100’s of eV) Oxygen Atom Neutral Beams” December 1999 |
Ph.D |
Associate Professor, Department of Chemical Engineering, IIT Kanpur, India. |
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Theodoros Panagopoulos, “Three-Dimensional Simulation of Inductively Coupled Plasma Reactor” August 1999 |
Ph.D |
Lam Research Corp., Fremont, CA |
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Vikas Midha, “Spatiotemporal Evolution of a Pulsed Chlorine Discharge” August 1999 |
Ph.D |
General Electric R&D Center |
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N. A. Kubota, Molecular Dynamics Simulations of Plasma Surface Interactions for Microelectronics Processing Applications" August 1998 |
Ph.D |
Sandia National Labs, Livermore, CA |
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John Feldsien, “Oxide Etching in Inductively Coupled Fluorocarbon Plasmas: Chemistry and Reactor Simulation” May 1998 |
Ph.D |
Texas Instruments, Inc. |
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Richard S. Wise, "Inductively Coupled Plasma Reactors: Modeling, Simulation, and Experimental Validation" July 1996 |
Ph.D |
IBM Corp. |
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Satish Athavale, "Realization of Atomic Layer Etching (ALET) of Silicon" August 1995 |
Ph.D |
Deutshce Banc Alex Brown |
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Dimitris Lymberopoulos, "Modeling and Multidimensional Simulation of Plasma Processing Reactors" May 1995 |
Ph.D |
Applied Materials, Santa Clara, CA |
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Robert Koemtzopoulos, "Plasma-Assisted Chemical Vapor Deposition of Diamond" May 1994 |
Ph.D |
Lam Research Corp., Fremont, CA |
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Ping Jiang, "Power-Modulated Plasmas: Modeling, Diagnostics and Etching of Polymers" May 1994 |
Ph.D |
Texas Instruments, Dallas, TX |
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Nancy Bassett, "Diagnostics and Modeling of Argon and Argon/Chlorine Glow Discharge Plasmas" May 1994 |
Ph.D |
CVC Products, Rochester, NY |
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Shashank C. Deshmukh, "Radical Beam Ion Beam Etching (RBIBE): Reactor Characterization and Etching of Y1Ba2Cu3Ox Thin Film Superconductors" May 1993 |
Ph.D |
Lam Research Corp., Fremont, CA |
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Eray S. Aydil, "Theoretical and Experimental Investigation of Chlorine RF Glow Discharges and Polysilicon Etching" August 1991 |
Ph.D |
Professor of Chemical Engineering and Materials Science, University of Minnesota |
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Sang-Kyu Park, “Analysis of Glow Discharge and Transport Phenomena in Plasma Reactors” April 1990 |
Ph.D |
HanBIt SeMaTech Co., Ltd., South Korea |
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C. B. Shin, “Effect of Convection on the Shape Evolution of Cavities during Chemical Etching of Thin Solid Films” December 1989 |
Ph.D |
Professor of Chemical Engineering, Ajou University, South Korea |
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| Gary D. Williams, “Experimental and Theoretical Studies of Uniformity in a Plasma Etching Reactor” December 1987 |
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M.Sc. |
Dow Chemical, Midland, MI |