Dr. Demetre J. Economou

Professor and Associate Chairman of Chemical and Biomolecular Engineering
Hugh Roy and Lillie Cranz Cullen Distinguished University Chair Office Location: S239, Engineering Building 1
Telephone: (713) 743-4320
Fax: (713) 743-4323
E-mail: economou@uh.edu

Dr. Vincent M. Donnelly

Professor of Chemical and Biomolecular Engineering

Office Location: S232, Engineering Building 1
Telephone: (713) 743-4313
Fax: (713) 743-4323
E-mail: vmdonnelly@ uh.edu

Postdoctoral Research Associates

   

 

 

Paola Diomede

Ph.D. in Chemical Sciences, University of Bari, Italy, 2005

Research interests
Control of ion energy distribution
Modeling of plasma sources for atomic layer etching applications
Numerical models for neutral and weakly ionized gases based on kinetic theory
Semi-analytical sheath modeling
Fluid modeling of plasma discharges
Hydrogen plasmas
Plasma discharges for materials processing and neutral beam injection applications

 

 

 

Email: pdiomede@uh.edu
Office Location: S44, Engineering Building 1

 

 

 
   

 

 

Vladimir Samara

Ph.D. in Physics at The Open University, Milton Keynes, UK
Dissertation title: Negative Ions and Neutral Beams in Plasma Etching

Research Interests: Plasma, ionized gases, dry etch, plasma diagnostics, experimental physics, computer simulations, digital image processing

Email: vsamara@central.uh.edu
Office Location: S44, Engineering Building 1

 

 

Graduate Students

 

 

 

Siyuan Tian

Project: Nanopantography
Email: siyuantien@gmail.com
Office Location: S44H, Engineering Building 1

 

 

   

 

 

Ashutosh K Srivastava

Project: Spinning Wall
Email: ashu.srivastava@gmail.com
Office Location: S190, Engineering Building 1

 

 

 

 

 
   

 

 

Shyam Sridhar

Project: Atomic Layer Etching
Email: shyamsridhar88@gmail.com
Office Location: S44B, Engineering Building 1

 

 

 

 

 

Lei Liu

Project: Atomic Layer Etching
Email: liulei360@gmail.com
Office Location: S44B, Engineering Building 1

 

 

 

 

 
 

 

 

Qiaowei Lou

Project: SiN Etching
Email:qlou@uh.edu
Office Location: S44, Engineering Building 1

 

 

     
 

 

 

Sanbir Kaler

Project: SiN Etching
Email:qlou@uh.edu
Office Location: S44, Engineering Building 1

 

 

     

Tyler List

Project:
Email:tllist@uh.edu
Office Location: S44, Engineering Building 1

     

Tianyu Ma

Project:
Email:mtyxnb@gmail.com
Office Location: S44, Engineering Building 1

 

 

     

 

 

 

 

Visiting Researchers

 

 

 
   

 

 

John A. Mucha

Ph.D., Senior Research Associate
Email: jay_mucha@yahoo.com
Office Location: S44, Engineering Building

 

 

 
   

 

 
   

 

 

Former Members

 

 

Current Affilation

Weiye Zhu, “Advanced Control of Ion and Electron Energy Distributions and Investigation of in-situ Photo-Assisted Etching”, May 2014

 

Ph.D.

Lam research Corp., Fremont CA

Erdinc Karakas, “Diagnostics of a CH3F/O2 Plasma”

 

Postdoc.

GLOBALFOUNDRIES, Albany NY

Zhuo (Carol) Chen, “Layer-by-Layer Growth and Nano-crystallization of Si:H Films” December 2012

 

Ph.D.

Currently with Micron, Boise ID

Se Youn Moon, “Diagnostics of a RLSAŠ Plasma Source”

 

Postdoc.

Jeonbuk National University, Korea

Hyungjoo Shin

 

Postdoc.

Lam Research Corp., Fremont CA

Rohit Khare "Spinning Wall"

 

Ph.D.

Lam Research Corp., Fremont CA

Sergey Belostotskiy, "Diagnostics of High Pressure Microdischarge Plasmas" December 2009

 

Ph.D.

Applied Materials, Santa Clara, CA

Joydeep Guha, "Study of Plasma Surface Interaction by Spinning Wall Method" August 2008

 

Ph.D.

Lam Research Corp., Fremont, CA

Alok Ranjan, “Diagnostics of Fast Neutral Beams”, August 2008

 

Ph.D.

Tokyo Electron, Albany, NY

Manish Kumar Jain, “Simulations and Experimental Studies of Nanopantography, a Method for Parallel Patterning over Large Areas” December 2007

 

M.Sc.

Bechtel, Houston, TX

Lin Xu, “Nanopantography: A New Method for Massively Parallel Nanopatterning Over Large Areas” August 2008.

 

Ph.D.

Lam Research Corp., Fremont CA

Nirmal Tatavalli Mittadar, “Efficient Design of Experiments for Complex Response Surfaces with Application to Etching Uniformity in a Plasma Reactor August 2007.

 

Ph.D.

Shell Global Solutions, Houston, TX

Qiang Wang, “Experimental and Theoretical Investigation of Atmospheric Pressure Direct Current Microdischarges” December 2006

 

Ph.D.

Technip, Houston, TX

Sang Ki Nam, “Particle-in-Cell Simulation of Beam Extraction from a Plasma through a Grid: Application to Neutral beam Sources and Nanopantography” August 2006

 

Ph.D.

Applied Materials, Santa Clara, CA

Doosik Kim, “Plasma Molding Over Surface Topography: Simulation of Ion Flow, and Energy and Angular Distributions Over Steps and Trenches in RF High Density Plasmas” August 2002

 

Ph.D.

Intel Corp., Portland OR

Badri Ramamurthi, “Simulation of Low-Pressure Inductively Coupled Plasmas: Non-Local Effects and Pulsed Power Operation" August 2002

 

Ph.D.

General Electric R&D Center

Chang-Koo Kim, “Interaction of a Plasma with a Hole Having Diameter Larger than the Sheath Thickness” December 2000

 

Ph.D.

Associate Professor, Department of Chemical Engineering, Ajou University, South Korea.

Siddhartha Panda, “Anisotropic Etching of Polymer Films by Energetic (100’s of eV) Oxygen Atom Neutral Beams” December 1999

 

Ph.D.

Professor, Department of Chemical Engineering, IIT Kanpur, India.

Theodoros Panagopoulos, “Three-Dimensional Simulation of Inductively Coupled Plasma Reactor” August 1999

 

Ph.D.

Lam Research Corp., Fremont CA

Vikas Midha, “Spatiotemporal Evolution of a Pulsed Chlorine Discharge” August 1999

 

Ph.D.

General Electric R&D Center

N. A. Kubota, Molecular Dynamics Simulations of Plasma Surface Interactions for Microelectronics Processing Applications" August 1998

 

Ph.D.

Sandia National Labs, Livermore, CA 

John Feldsien, “Oxide Etching in Inductively Coupled Fluorocarbon Plasmas: Chemistry and Reactor Simulation” May 1998

 

Ph.D.

Lam Research Corp., Hillsboro OR

Richard S. Wise "Inductively Coupled Plasma Reactors: Modeling, Simulation, and Experimental Validation" July 1996

 

Ph.D.

Lam Research Corp., Fremont CA

Satish Athavale, "Realization of Atomic Layer Etching (ALET) of Silicon" August 1995

 

Ph.D.

Deutshce Banc Alex Brown

Dimitris Lymberopoulos, "Modeling and Multidimensional Simulation of Plasma Processing Reactors" May 1995

 

Ph.D.

Lam Research Corp., Fremont CA

Robert Koemtzopoulos, "Plasma-Assisted Chemical Vapor Deposition of Diamond" May 1994

 

Ph.D.

Lam Research Corp. Fremont, CA

Ping Jiang, "Power-Modulated Plasmas: Modeling, Diagnostics and Etching of Polymers" May 1994

 

Ph.D.

Texas Instruments, Dallas, TX

Nancy Bassett, "Diagnostics and Modeling of Argon and Argon/Chlorine Glow Discharge Plasmas" May 1994

 

Ph.D.

CVC Products, Rochester, NY

Shashank C. Deshmukh, "Radical Beam Ion Beam Etching (RBIBE): Reactor Characterization and Etching of Y1Ba2Cu3Ox Thin Film Superconductors" May 1993

 

Ph.D.

Lam Research Corp., Fremont CA

Eray S. Aydil, "Theoretical and Experimental Investigation of Chlorine RF Glow Discharges and Polysilicon Etching" August 1991

 

Ph.D.

Professor of Chemical Engineering and Materials Science, University of Minnesota

Sang-Kyu Park, “Analysis of Glow Discharge and Transport Phenomena in Plasma Reactors” April 1990

 

Ph.D.

HanBIt SeMaTech Co., Ltd., South Korea

C. B. Shin, “Effect of Convection on the Shape Evolution of Cavities during Chemical Etching of Thin Solid Films” December 1989

 

Ph.D.

Professor of Chemical Engineering, Ajou University, South Korea

Gary D. Williams, “Experimental and Theoretical Studies of Uniformity in a Plasma Etching Reactor” December 1987

 

M.Sc.

Dow Chemical, Midland, MI