Research

• ATOMIC LAYER ETCHING (ALET)

• NANOPANTOGRPAHY

• PLASMA MODELING AND SIMULATION

• PLASMA-SURFACE INTERACTIONS: “SPINNING WALL”

• PLASMA DIAGNOSTICS

• PLASMA ETCHING OF NEW MATERIALS

• ATMOSPHERIC PRESSURE MICRO-DISCHARGES

• NEUTRAL BEAM NANO-PROCESSING

• PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) FOR SOLAR CELLS