Notes

Process Integration for VLSI Circuits

Plart 1, Part 2

Silicon Nanotechnology:

Read: http://www.intel.com/research/silicon/nanotechnology.htm and/or listen: http://wps2a.semi.org/wps/portal/_pagr/103/_pa.103/248?&dFormat=application/msword&docName=P029804

 

Isolation Technologies for Integrated Circuits

Part 1, Part 2, Part 3

 

Contact Technology and Local Interconnects for VLSI 

Part 1, Part 2, Part 3, and also see: http://www.stanford.edu/class/ee311/NOTES/Ohmic_Contacts_Slides.pdf

 

Interconnects

Part 1 Part 2 Part 3 Part 4 Part 5 Part 6 Part 7 Part 8 (added), and Additional Pages,

 

NMOS Devices and NMOS Process Integration

Part 1 Part 2 Part 3

 

CMOS Devices and CMOS Process Integration

Part 1 Part 2 Part 3

 

Bipolar and BiCMOS Devices and Process Integration

Part 1 Part 2 Part 3 Part 4 Part 5 SiGe-IBM BJT_basics

 

Semiconductor Memories

 Part 1 Part 2 Part 3

 

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